OLED & PLED Thin Film Deposition Evaporator Systems

Compact & Chamber Evaporator Gloveboxes

PureLab Glove Box Compact Evaporator

PureLab Glove Box Chamber Evaporator

Innovative Technology Inc thin film deposition systems are engineered for use in academic research, as well as in large-scale industrial applications.

Producing multi-thin film layers requires Inert atmospheric conditions of <1 ppm of O₂ and H₂O and a continuous particulate free environment provided in all of Innovative Technology, Inc Glove Box Systems. Innovative Technology Inc OLED/PLED thin film evaporative Glove Boxes provide the necessary atmospheric conditions required for the deposition of multilayer thin films; without disturbing intermediate layers caused by physical or chemical absorption.

Innovative Technology, Inc thin film deposition systems and Glove Boxes are extremely dependable systems that are capable of achieving coating uniformities of <5% in semiconductor device fabrication applications. Configurations range from bell jars to automatic loading chamber systems in Glove Boxes for the coating of wafers (and other applications) ranging in size from 2" to 300mm.

Innovative Technology, Inc Glove Box Vacuum Coating Systems are utilized in a variety of leading edge research fields including but not limited to OLED (organic light emitting diodes) MEMS micro electro mechanical systems moisture barrier encapsulation layer research. a-Si PV amorphous silicon photovoltaics, TFT-LCD thin film transistor liquid crystal displays, LTPS low temperature poly silicon, CG-Silicon continuous grain silicon and other mobile display device technology research. These display technologies require long term protection from the air which carries a high content of water moisture and oxygen.

Resistive Thermal Evaporation
Designed for research and development involving organic materials science, organic light emitting diode technology, and flexible OLED display barrier coatings. Research fields include organic light emitting diodes (OLED), flat panel displays, solar panels, photovoltaics, nanotechnology, materials science, thin film battery metallization and much more.

Electron Beam Evaporation
For research and development involving high vacuum evaporation of pure metallic elements in addition to numerous alloys and compounds. Thin film research applications making use of electron beam evaporation technology include medical, metallurgical, telecommunication, micro electronics, optical coating, nanotechnology and the semiconductor industry.

Magnetron Sputter Deposition
Research and development involving photovoltaic and optoelectronic materials and devices. Our magnetron sputtering system may be easily adapted for a variety of leading edge research fields including organic light emitting diodes (OLED), flat panel displays, solar panels, photovoltaics, nanotechnology, materials science and much more.

OLED & PLED Thin Film Deposition Evaporator Gloveboxes